Supporting Equipment Reliability, Process Stability, and Facility Performance

Supporting Every Stage of Semiconductor Manufacturing

Successful semiconductor manufacturing relies on stable production processes and equipment that’s reliable enough to maintain continuous facility operations. From cleanroom process tools to subfab utilities and facility infrastructure, Flir has the thermal and acoustic imaging solutions teams need to identify abnormal conditions, improve equipment reliability, support process monitoring, and investigate quality issues before they impact production.

 

Our Solutions for the Semiconductor Manufacturing Industry

CLEANROOM

Thermal Hot Spots

Identify abnormal heat in process tools and critical components before issues escalate. Earlier detection helps teams troubleshoot developing problems that can affect equipment reliability, process stability, and product quality.

CLEANROOM

Vacuum Integrity

Detect vacuum leaks in chambers, valves, connectors, and supporting utility systems. Faster leak localization can help maintain vacuum integrity, reduce losses from compressed air and specialty gases, and shorten troubleshooting time.

CLEANROOM

Equipment Health

Monitor electrical and mechanical components for abnormal thermal conditions and other early signs of developing problems. Finding issues sooner helps teams schedule maintenance before equipment problems lead to unplanned downtime.

SUBFAB

Vacuum Systems

Find leaks in pumps, seals, piping, and connections that can compromise vacuum-system performance. Earlier detection supports more efficient troubleshooting, equipment availability, process stability, and reduced utility losses.

SUBFAB

Equipment Monitoring

Detect overheating in motors, bearings, electrical components, and other critical subfab equipment. Identifying developing problems early helps reduce the risk of equipment failures that can disrupt production, increase operating costs, or affect process stability.

FACILITY

Cooling Systems

Monitor temperature performance in chillers, heat exchangers, and cooling lines to identify abnormal conditions. Maintaining specified operating temperatures helps support reliable equipment performance and reduce the risk of temperature-related failures.

CLEANROOM

Thermal Process Monitoring

Monitor process temperatures, verify thermal uniformity, and capture high frame rate temperature measurements. Greater visibility into thermal performance helps teams identify process variations, support process stability, and investigate conditions that can affect product quality.

FACILITY

Remote Monitoring of Critical Areas

Continuously monitor high-temperature, difficult-to-access, or restricted areas without requiring routine in-person inspection. Remote thermal monitoring provides greater visibility into critical conditions while supporting safer, more efficient operations.

CLEANROOM

Microcale Thermal Analysis for R&D & Quality Inspection

Detect thermal anomalies and localized defects at the device and package level. Detailed thermal analysis helps teams investigate product-quality issues, support root cause analysis, and better understand thermal behavior during R&D and manufacturing.

Recommended Products - Handheld Imaging

Recommended Products - Fixed Cameras

Software Solutions

Assetlink

Assetlink

基于资产架构的软件(18 个月免费)

Thermal Studio Suite 套件

Thermal Studio Suite 套件

分析和报告软件

Ignite

Ignite

基于云的热图像存储和报告软件

Flir Research Studio

Flir Research Studio

传输、记录和分析软件

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