Supporting Equipment Reliability, Process Stability, and Facility Performance

Supporting Every Stage of Semiconductor Manufacturing

Successful semiconductor manufacturing relies on stable production processes and equipment that’s reliable enough to maintain continuous facility operations. From cleanroom process tools to subfab utilities and facility infrastructure, Flir has the thermal and acoustic imaging solutions teams need to identify abnormal conditions, improve equipment reliability, support process monitoring, and investigate quality issues before they impact production.

Our Solutions for the Semiconductor Manufacturing Industry

CLEANROOM

Thermal Hot Spots

Identify abnormal heat in process tools and critical components.

CLEANROOM

Vacuum Integrity

Detect vacuum leaks in chambers, valves, and connectors.

CLEANROOM

Equipment Health

Monitor electrical and mechanical components for early signs of failure.

SUBFAB

Vacuum Systems

Find leaks in pumps, seals, and piping to maintain vacuum performance.

SUBFAB

Equipment Monitoring

Detect overheating in motors, bearings, and electrical components.

FACILITY

Cooling Systems

Monitor temperature performance in chillers, heat exchangers, and cooling lines.

CLEANROOM

Thermal Process Monitoring

Monitor process temperatures, verify thermal uniformity, and capture high frame rate temperature measurements to optimize processes and improve product quality.

FACILITY

Remote Monitoring of Critical Areas

Monitor high-temperature or restricted areas remotely to improve visibility and support safter operations.

CLEANROOM

Microcale Thermal Analysis for R&D & Quality Inspection

Detect thermal anomalies and localized defects at the device and package level to improve product quality, support root cause analysis, and optimize manufacturing processes

Recommended Products - Handheld Imaging

Recommended Products - Fixed Cameras

Software Solutions

Assetlink

Assetlink

Asset-Hierarchie-basierte Software (18 Monate kostenlos)

Thermal Studio Suite

Thermal Studio Suite

Software für Analysen und Berichte

Zünden

Zünden

Cloudbasierte Software zur Speicherung von Wärmebildern und zur Berichterstattung

Forschungsstudio

Forschungsstudio

Software für Streaming, Aufzeichnung und Analyse

 

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